Invention Grant
- Patent Title: Semiconductor device having fin-shaped semiconductor layer
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Application No.: US15467676Application Date: 2017-03-23
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Publication No.: US09755053B2Publication Date: 2017-09-05
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/66 ; H01L29/423 ; H01L21/8238 ; H01L21/8234 ; H01L27/092

Abstract:
An SGT production method includes a first step of forming a fin-shaped semiconductor layer on a semiconductor substrate and forming a first insulating film; a second step of forming a pillar-shaped semiconductor layer, a first dummy gate, and a first hard mask formed from a third insulating film; a third step of forming a second hard mask on a side wall of the first hard mask, and forming a second dummy gate; a fourth step of forming a sidewall and forming a second diffusion layer; a fifth step of depositing an interlayer insulating film, exposing upper portions of the second dummy gate and the first dummy gate, removing the second dummy gate and the first dummy gate, forming a first gate insulating film, and forming a gate electrode and a gate line; and a sixth step of forming a first contact and a second contact.
Public/Granted literature
- US20170194460A1 SEMICONDUCTOR DEVICE HAVING FIN-SHAPED SEMICONDUCTOR LAYER Public/Granted day:2017-07-06
Information query
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