Invention Grant
- Patent Title: High voltage device fabricated using low-voltage processes
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Application No.: US15075972Application Date: 2016-03-21
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Publication No.: US09755072B2Publication Date: 2017-09-05
- Inventor: Fengliang Xue , Fethi Dhaoui , John L. McCollum
- Applicant: Microsemi SoC Corporation
- Applicant Address: US CA San Jose
- Assignee: MICROSEMI SoC CORPORATION
- Current Assignee: MICROSEMI SoC CORPORATION
- Current Assignee Address: US CA San Jose
- Agency: Leech Tishman Fuscaldo & Lampl
- Agent Kenneth D'Alessandro, Esq.
- Main IPC: H01L21/265
- IPC: H01L21/265 ; H01L29/66 ; H01L29/78 ; H01L29/06 ; H01L29/08

Abstract:
A method for fabricating a high-voltage transistor on a semiconductor substrate includes defining and forming shallow trench isolation regions for all of the transistors, defining and forming well regions for all of the transistors, forming a gate oxide layer in the well regions for all of the transistor, forming gates for all of the transistors over the gate oxide layer, implanting a dopant to form lightly-doped drain regions for all of the transistors, the lightly-doped drain regions for at least drains of the high-voltage transistors being spaced apart from an inner edge of the shallow trench isolation regions, forming gate spacers at sides of the gates of all of the transistors, and implanting a dopant to form sources and drains for all of the transistors, the drains of the high-voltage transistors being formed completely surrounded by the lightly-doped drain regions of the high-voltage transistors.
Public/Granted literature
- US20160204223A1 HIGH VOLTAGE DEVICE FABRICATED USING LOW-VOLTAGE PROCESSES Public/Granted day:2016-07-14
Information query
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