Invention Grant
- Patent Title: On/off ratio for nonvolatile memory device and method
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Application No.: US14455817Application Date: 2014-08-08
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Publication No.: US09755143B2Publication Date: 2017-09-05
- Inventor: Scott Brad Herner
- Applicant: Crossbar, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: CROSSBAR, INC.
- Current Assignee: CROSSBAR, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A switching device includes a first dielectric material formed overlying a substrate. A bottom wiring material and a switching material are sequentially formed overlying the first dielectric material. The bottom wiring material and the switching material are patterned and etched to form a first structure having a top surface region and a side region. The first structure includes a bottom wiring structure and a switching element having the top surface region including an exposed region. A second dielectric material is formed overlying the first structure. A first opening region is formed in a portion of the second dielectric layer to expose a portion of the top surface region. A dielectric side wall structure is formed overlying a side region of the first opening region. A top wiring material including a conductive material is formed overlying the top surface region to be directly contact with the switching element.
Public/Granted literature
- US20140346432A1 ON/OFF RATIO FOR NONVOLATILE MEMORY DEVICE AND METHOD Public/Granted day:2014-11-27
Information query
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