Invention Grant
- Patent Title: Synthesis and characterization of first row transition metal complexes containing α-imino alkoxides as precursors for deposition of metal films
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Application No.: US13765981Application Date: 2013-02-13
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Publication No.: US09758866B2Publication Date: 2017-09-12
- Inventor: Charles H. Winter , Lakmal C. Kalutarage
- Applicant: Wayne State University
- Applicant Address: US MI Detroit
- Assignee: Wayne State University
- Current Assignee: Wayne State University
- Current Assignee Address: US MI Detroit
- Agency: Brooks Kushman P.C.
- Main IPC: C23C16/18
- IPC: C23C16/18 ; C23C16/02 ; C23C16/455 ; C07F11/00 ; C07F13/00 ; C07F15/02 ; C07F15/04 ; C07F15/06 ; C07F1/00
Abstract:
A compound that is useful for forming a metal by reaction with a reducing agent is described by formula (I): wherein M is a metal selected from Groups 2 through 12 of the Periodic Table; and R1, R2, R3, and R4 are each independently H or C1-C8 alkyl.
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Information query
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