Invention Grant
- Patent Title: Manufacturing method of silicon single crystal having low-resistivity electrical characteristics
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Application No.: US14579035Application Date: 2014-12-22
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Publication No.: US09758899B2Publication Date: 2017-09-12
- Inventor: Tomohiro Fukuda
- Applicant: SUMCO TECHXIV CORPORATION
- Applicant Address: JP Nagasaki
- Assignee: SUMCO TECHXIV CORPORATION
- Current Assignee: SUMCO TECHXIV CORPORATION
- Current Assignee Address: JP Nagasaki
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2008-061659 20080311
- Main IPC: C30B15/04
- IPC: C30B15/04 ; C30B29/06

Abstract:
Disclosed is a silicon single crystal pull-up apparatus that can grow a silicon single crystal having a desired electrical resistivity, to which a sublimable dopant has been reliably added, regardless of the length of the time necessary for the formation of a first half part of a straight body part in a silicon single crystal. Also disclosed is a process for producing a silicon single crystal. The silicon single crystal pull-up apparatus pulls up a silicon single crystal from a melt by a Czochralski method. The silicon single crystal pull-up apparatus comprises a pull-up furnace, a sample chamber that is externally mounted on the pull-up furnace and houses a sublimable dopant, a shielding mechanism that thermally shields the pull-up furnace and the sample chamber, and supply means that, after the release of shielding of the shielding mechanism, supplies the sublimable dopant into the melt.
Public/Granted literature
- US20150107509A1 SILICON SINGLE CRYSTAL PULLING APPARATUS AND MANUFACTURING METHOD OF SILICON SINGLE CRYSTAL Public/Granted day:2015-04-23
Information query
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