Invention Grant
- Patent Title: Vacuum pump
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Application No.: US13697982Application Date: 2011-05-20
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Publication No.: US09759221B2Publication Date: 2017-09-12
- Inventor: Takashi Kabasawa
- Applicant: Takashi Kabasawa
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JP2010-144233 20100624
- International Application: PCT/JP2011/062148 WO 20110520
- International Announcement: WO2011/162070 WO 20111229
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D29/02

Abstract:
Provided is a vacuum pump in which no finish processing has to be carried out after shaping of a cylindrical rotor even in use of a cylindrical rotor obtained by shaping a fiber-reinforced plastic material into a cylindrical shape. The vacuum pump has a turbo-molecular pump section and a thread groove pump section. The upper end section of a cylindrical rotor, which is obtained by shaping a fiber-reinforced plastic material into a cylindrical shape, of the thread groove pump section, is joined to the lower end section of a rotor of the turbo-molecular pump section. A joining portion of the rotor of the turbo-molecular pump section and the cylindrical rotor of the thread groove pump section is disposed upstream of an exhaust passage. As a result, finish processing does not have to be carried out after shaping of the cylindrical rotor. If finish processing is performed after shaping of the cylindrical rotor a resin may be coated onto a rugged portion of the cylindrical rotor, or fibers may be helically wound at a winding angle not greater than 45 degrees.
Public/Granted literature
- US20130115094A1 VACUUM PUMP Public/Granted day:2013-05-09
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