Invention Grant
- Patent Title: Stator member and vacuum pump
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Application No.: US14349022Application Date: 2012-10-03
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Publication No.: US09759233B2Publication Date: 2017-09-12
- Inventor: Yoshiyuki Sakaguchi , Satoshi Okudera
- Applicant: Yoshiyuki Sakaguchi , Satoshi Okudera
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JP2011-239457 20111031
- International Application: PCT/JP2012/075616 WO 20121003
- International Announcement: WO2013/065440 WO 20130510
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D29/58 ; F04D29/52 ; F04D29/54 ; F04D29/02

Abstract:
To provide a stator member that facilitates thermal radiation from a surface thereof and thermal conduction to an adjacent member, and a vacuum pump that contains the stator member. For the purpose of enhancing heat dissipation of a rotor portion, surface treatment removal processing is performed on a predetermined section of a thread groove spacer in order to efficiently release heat of the thread groove spacer toward a base and a stator blade spacer. More specifically, the surface treatment removal processing removes the surface treatment of the base and a section where the stator blade spacer comes into contact with the thread groove spacer. This surface treatment removal processing is executed simultaneously with finishing processing.
Public/Granted literature
- US20140241872A1 Stator Member and Vacuum Pump Public/Granted day:2014-08-28
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