Invention Grant
- Patent Title: Hybrid MEMS microfluidic gyroscope
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Application No.: US14425153Application Date: 2013-09-04
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Publication No.: US09759562B2Publication Date: 2017-09-12
- Inventor: Julius Georgiou , Charalambos Michael Andreou
- Applicant: Julius Georgiou , Charalambos Michael Andreou
- Applicant Address: CY Nicosia
- Assignee: University of Cyprus
- Current Assignee: University of Cyprus
- Current Assignee Address: CY Nicosia
- Agency: Bockhop Intellectual Property Law, LLC
- Agent Bryan W. Bockhop
- International Application: PCT/IB2013/002555 WO 20130904
- International Announcement: WO2014/037808 WO 20140313
- Main IPC: A61B5/00
- IPC: A61B5/00 ; G01C19/14 ; G01P15/00 ; G01P15/03 ; A61N1/36 ; G01P3/26 ; G01P15/08 ; G01P15/14 ; A61B5/11
Abstract:
A hybrid MEMS microfluidic gyroscope is disclosed. The hybrid MEMS microfluidic gyroscope may include a micro-machined base enclosure having a top fluid enclosure, a fluid sensing enclosure and a bottom fluid enclosure. The hybrid MEMS microfluidic gyroscope may include a plurality of cantilevers disposed within the bottom semi-circular portion of the micro-machined base enclosure or a single membrane disposed within the bottom semi-circular portion of the micro-machined base enclosure.
Public/Granted literature
- US20150260518A1 HYBRID MEMS MICROFLUIDIC GYROSCOPE Public/Granted day:2015-09-17
Information query
