Gas sensor array, gas analysis method, and gas analysis system
Abstract:
A gas sensor array containing a gas flow path in which a gas to be analyzed flows, and a plurality of gas sensors set along the gas flowing direction of the gas flow path, wherein the gas sensors each has a constitution wherein semiconductor microcrystals that come into contact with the gas to be analyzed that flows in the above gas flow path are disposed between two electrodes.
Public/Granted literature
Information query
Patent Agency Ranking
0/0