Invention Grant
- Patent Title: Optical scanning device
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Application No.: US13808366Application Date: 2011-06-30
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Publication No.: US09759910B2Publication Date: 2017-09-12
- Inventor: Stefan Richter , Enrico Geissler
- Applicant: Stefan Richter , Enrico Geissler
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Haug Partners LLP
- Priority: DE102010026571 20100707
- International Application: PCT/EP2011/003241 WO 20110630
- International Announcement: WO2012/003938 WO 20120112
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G02B21/00

Abstract:
The invention is directed to an optical scanning device with two scanning mirrors and with optical elements for imaging the two scanning mirrors one onto the other by means of an intermediate image. A control unit is provided for supplying drives which are coupled to the scanning mirrors with excitation voltages or excitation currents to initiate deflection angles ranging from zero to the maximum possible deflection angle for the two scanning mirrors. At least one of the scanning mirrors is designed for biaxial scanning, and the control unit is designed to vary the driving of the two scanning mirrors with respect to biaxial or uniaxial deflection of the beam bundle electively in quasistatic or resonant mode of operation. At least one of the two scanning mirrors is preferably designed as MEMS assembly.
Public/Granted literature
- US20130107338A1 OPTICAL SCANNING DEVICE Public/Granted day:2013-05-02
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