Invention Grant
- Patent Title: Exposure apparatus, mask, and optical film
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Application No.: US14692756Application Date: 2015-04-22
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Publication No.: US09760013B2Publication Date: 2017-09-12
- Inventor: Yasuaki Umezawa , Tatsuya Sato , Kazuhiro Ura , Kenichi Watabe , Yuichi Kakubari
- Applicant: ARISAWA MFG. CO., LTD.
- Applicant Address: JP Nigata
- Assignee: ARISAWA MFG. CO., LTD
- Current Assignee: ARISAWA MFG. CO., LTD
- Current Assignee Address: JP Nigata
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B27/28 ; G03F1/38 ; G02B5/30 ; G02F1/1337 ; G03F7/00

Abstract:
Provided is an exposure apparatus including a transporting section; a first polarized light output section that outputs first polarized light; a second polarized light output section that outputs second polarized light; a first mask section that has formed therein a first aperture section that passes the first polarized light for exposing an orientation film and blocks the first polarized light; and a second mask section that has formed therein a second aperture section that passes the second polarized light for exposing the orientation film and blocks the second polarized light. The first aperture section and the second aperture section are formed to expose a certain region of the orientation film in an overlapping manner.
Public/Granted literature
- US20150227057A1 EXPOSURE APPARATUS, MASK, AND OPTICAL FILM Public/Granted day:2015-08-13
Information query
IPC分类: