- Patent Title: Filtered cathodic arc method, apparatus and applications thereof
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Application No.: US14483093Application Date: 2014-09-10
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Publication No.: US09761424B1Publication Date: 2017-09-12
- Inventor: Vladimir Gorokhovsky
- Applicant: Vladimir Gorokhovsky
- Applicant Address: US CO Lafayette
- Assignee: Nano-Product Engineering, LLC
- Current Assignee: Nano-Product Engineering, LLC
- Current Assignee Address: US CO Lafayette
- Agency: Lathrop Gage LLP
- Main IPC: C23C14/00
- IPC: C23C14/00 ; H01J37/34 ; C23C14/22

Abstract:
An apparatus for generating energetic particles and application of coatings in a vacuum comprising a plasma duct surrounded by a magnetic deflecting and focusing system communicating with a primary cathodic arc plasma source in a cathode chamber and a distal anode in a coating chamber. A coating chamber comprises a substrate holder off of an optical axis of the plasma source. A set of baffles are installed along the walls of cathode chambers and the plasma duct not occupied with plasma sources and in some embodiments across the plasma stream to trap macroparticles and neutrals. A plasma duct has a deflecting portion with attached cathode chamber and a tunnel portion attached to the coating chamber. The deflecting system comprises a deflecting coil surrounding the cathode chamber having an off-set deflecting conductor spaced from the plasma duct. In one embodiment a magnetron source is magnetically coupled with cathodic arc source.
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