Invention Grant
- Patent Title: Laser apparatus and extreme ultraviolet light generation system
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Application No.: US15016961Application Date: 2016-02-05
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Publication No.: US09762024B2Publication Date: 2017-09-12
- Inventor: Yoshiaki Kurosawa , Yasufumi Kawasuji
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/23
- IPC: H01S3/23 ; H01S3/223 ; H01S3/107 ; H05G2/00 ; G03F7/20 ; H01S3/10 ; H01S3/00 ; H01S3/034

Abstract:
An example of the disclosure is a laser apparatus including a master oscillator capable of outputting a pulse laser beam, a plurality of optical amplifiers disposed on an optical path of the pulse laser beam outputted from the master oscillator and configured to sequentially amplify the pulse laser beam, an optical reflector capable of passing the pulse laser beam therethrough and reflecting a self-oscillation beam generated in one of the plurality of optical amplifiers, and an optical absorber capable of receiving and absorbing the self-oscillation beam reflected by the optical reflector.
Public/Granted literature
- US20160156150A1 LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM Public/Granted day:2016-06-02
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