Invention Grant
- Patent Title: Wavelength-tunable vertical cavity surface emitting laser for swept source optical coherence tomography system
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Application No.: US14930191Application Date: 2015-11-02
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Publication No.: US09762031B2Publication Date: 2017-09-12
- Inventor: Toshihiko Makino , Tongning Li , David Eu
- Applicant: Inphenix, Inc.
- Applicant Address: US CA Livermore
- Assignee: InPhenix, Inc.
- Current Assignee: InPhenix, Inc.
- Current Assignee Address: US CA Livermore
- Agency: VLP Law Group LLP
- Agent Richard G. A. Bone
- Main IPC: H01S5/183
- IPC: H01S5/183 ; H01S5/34 ; G01N21/47 ; G01B9/02 ; H01S5/343

Abstract:
A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) with the use of microelectromechanical system (MEMS) technology is provided as a swept source for Optical Coherence Tomography (OCT). The wavelength-tunable VCSEL comprises a bottom mirror of the VCSEL, an active region, and a MEMS tunable upper mirror movable by electrostatic deflections. The bottom mirror comprising a GaAs based distributed Bragg reflector (DBR) stack, and the active region comprising multiple stacks of GaAs based quantum dot (QD) layers, are epitaxially grown on a GaAs substrate. The MEMS tunable upper mirror includes a membrane part supported by suspension beams, and an upper mirror comprising a dielectric DBR stack. The MEMS tunable quantum dots VCSEL can cover an operating wavelength range of more than 100 nm, preferably with a center wavelength between 250 and 1950 nm, and the sweeping rate can be from a few kHz to hundreds of kHz, and up to a few MHz.
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