Invention Grant
- Patent Title: Method of producing carrier for use in double-side polishing apparatus and method of double-side polishing wafers
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Application No.: US14761554Application Date: 2014-01-15
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Publication No.: US09764443B2Publication Date: 2017-09-19
- Inventor: Kazuya Sato , Yuki Tanaka , Syuichi Kobayashi , Kenji Iha , Toshinari Kinjo
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2013-025515 20130213; JP2013-250319 20131203
- International Application: PCT/JP2014/000134 WO 20140115
- International Announcement: WO2014/125759 WO 20140821
- Main IPC: B24B37/28
- IPC: B24B37/28 ; B24B7/22 ; B24B7/24 ; B24B7/17 ; B24B37/08 ; H01L21/304 ; H01L21/673

Abstract:
A method of producing a carrier for use in a double-side polishing apparatus, the method including engaging an insert with a holding hole formed in a carrier body and sticking the insert to the holding hole, the carrier body being configured to be disposed between upper and lower turn tables to which polishing pads are attached of the double-side polishing apparatus, the holding hole being configured to hold a wafer during polishing, the insert being configured to contact an edge of the wafer to be held, the method including: performing a lapping process and a polishing process on the insert; engaging the insert subjected to the lapping process and the polishing process with the holding hole of the carrier body; and sticking and drying the engaged insert while applying a load to the insert in a direction perpendicular to main surfaces of the carrier body.
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