Invention Grant
- Patent Title: Rotary joint and polishing apparatus
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Application No.: US14682477Application Date: 2015-04-09
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Publication No.: US09764446B2Publication Date: 2017-09-19
- Inventor: Hideo Aizawa , Tadakazu Sone , Masao Umemoto , Ryuichi Kosuge
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2014-081010 20140410
- Main IPC: B24B57/02
- IPC: B24B57/02 ; B24B37/10

Abstract:
The invention suppresses generation of noises attributable to rotation of a rotary joint. A rotary joint includes a rotating body that rotates on a rotating axis A, a housing disposed so as to surround the rotating body, and at least one bearing disposed between the rotating body and the housing and adapted to support rotation of the rotating body. The rotary joint supplies fluids through fluid connection ports formed in the housing and fluid passages formed inside the rotating body to a polishing table having attached thereto a polishing pad for polishing a substrate or a holding portion that is adapted to hold the substrate while pressing the substrate against the polishing pad. At least one elastic member is interposed at least either between the rotating body and the at least one bearing or between the housing and the at least one bearing.
Public/Granted literature
- US20150290769A1 ROTARY JOINT AND POLISHING APPARATUS Public/Granted day:2015-10-15
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