Invention Grant
- Patent Title: Electronic device, electronic apparatus, and moving object
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Application No.: US14688310Application Date: 2015-04-16
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Publication No.: US09764940B2Publication Date: 2017-09-19
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-086545 20140418
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B81B3/00 ; G01P15/08

Abstract:
An electronic device includes a first functional element including a first movable element capable of moving in a first axis direction, and a first dummy electrode; a second functional element including a second movable element capable of moving in a second axis direction intersecting with the first axis direction, and a second dummy electrode; and a first wiring interconnecting the first dummy electrode and the second dummy electrode.
Public/Granted literature
- US20150298967A1 ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT Public/Granted day:2015-10-22
Information query
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