Invention Grant
- Patent Title: Cleaning methods and compositions
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Application No.: US13598272Application Date: 2012-08-29
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Publication No.: US09765289B2Publication Date: 2017-09-19
- Inventor: Hui-Jung Tsai , Hung-Jui Kuo , Chung-Shi Liu
- Applicant: Hui-Jung Tsai , Hung-Jui Kuo , Chung-Shi Liu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: B08B3/00
- IPC: B08B3/00 ; C11D11/00 ; H01L21/67 ; H01L21/02 ; C11D7/06 ; C11D7/32 ; H01L23/00

Abstract:
Methods and chemical solvents used for cleaning residues on metal contacts during a semiconductor device packaging process are disclosed. A chemical solvent for cleaning a residue formed on a metal contact may comprise a reactive inorganic component and a reactive organic component. The method may comprise spraying a semiconductor device with a chemical solvent at a first pressure, and spraying the semiconductor device with the chemical solvent at a second pressure less than the first pressure.
Public/Granted literature
- US20130276837A1 Cleaning Methods and Compositions Public/Granted day:2013-10-24
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