Invention Grant
- Patent Title: Process chamber gate valve
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Application No.: US14390998Application Date: 2013-04-08
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Publication No.: US09765897B2Publication Date: 2017-09-19
- Inventor: Shin-Young Jee
- Applicant: Presys Co., Ltd.
- Agent Donn K. Harms
- Priority: KR10-2012-0035930 20120406
- International Application: PCT/KR2013/002913 WO 20130408
- International Announcement: WO2013/151401 WO 20131010
- Main IPC: F16K3/18
- IPC: F16K3/18 ; F16K51/02 ; H01L21/67 ; F16K31/122 ; F16K31/524 ; H01L21/677

Abstract:
A gate valve for a process chamber includes a valve blade for closure of an opening communicating to the process chamber. The valve blade is employed to seal the opening in a valve housing. The valve blade moves first in a vertical direction and then in a horizontal direction normal to the opening when sealing against the opening. The valve blade moves first in the horizontal direction and subsequently in a vertical direction when disengaging from the opening.
Public/Granted literature
- US20160305555A1 Gate Valve Public/Granted day:2016-10-20
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