Invention Grant
- Patent Title: Method for treating a nonhomogenous surface
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Application No.: US14855242Application Date: 2015-09-15
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Publication No.: US09766063B2Publication Date: 2017-09-19
- Inventor: Amir Yasseri , Duane Outka , Michael Lopez
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- Main IPC: G01B11/30
- IPC: G01B11/30 ; H01J37/32

Abstract:
A method for treating a nonhomogeneous material surface of an object is provided. A plurality of test patches of the surface is treated for different amounts of time wherein the plurality of test patches have a total surface area. A property of each test patch is measured. A calibration curve of the property is generated with respect to time. The calibration curve and a target property are used to obtain a target time. A surface of the object with a surface area, which is greater than the total surface area of the plurality of test patches, is treated for the target time.
Public/Granted literature
- US20170074646A1 METHOD FOR TREATING A NONHOMOGENOUS SURFACE Public/Granted day:2017-03-16
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