Invention Grant
- Patent Title: Position sensing apparatus
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Application No.: US14381963Application Date: 2013-02-15
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Publication No.: US09766066B2Publication Date: 2017-09-19
- Inventor: Bernd W. Gotsmann , Emanuel Loertscher
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully Scott Murphy and Presser
- Priority: GB1203511.9 20120229
- International Application: PCT/IB2013/051239 WO 20130215
- International Announcement: WO2013/128321 WO 20130906
- Main IPC: G01B7/14
- IPC: G01B7/14 ; G01B21/16 ; G06F3/041 ; G01L1/20

Abstract:
A sensor apparatus is provided for sensing relative position of two objects. First and second molecular components, each comprising at least one electronic system, are connected to respective objects. The molecular components are arranged in mutual proximity such that an interaction between the electronic systems of respective components varies with relative position of the objects, the interaction affecting an electrical or optical property of the components. A detector detects the property to produce an output dependent on relative position of the objects.
Public/Granted literature
- US20150077359A1 Position Sensing Apparatus Public/Granted day:2015-03-19
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