Invention Grant
- Patent Title: Polymer layer system pressure sensor device, and polymer layer system pressure sensor method
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Application No.: US14239802Application Date: 2012-07-03
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Publication No.: US09766144B2Publication Date: 2017-09-19
- Inventor: Thomas Brettschneider , Christian Dorrer
- Applicant: Thomas Brettschneider , Christian Dorrer
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Priority: DE102011081887 20110831
- International Application: PCT/EP2012/062874 WO 20120703
- International Announcement: WO2013/029836 WO 20130307
- Main IPC: G01L7/00
- IPC: G01L7/00 ; B01L3/00 ; G01L9/00

Abstract:
A polymer layer system pressure sensor device includes a first polymer substrate having a first cavity and a first polymer membrane stretched over the first cavity. The first polymer membrane is configured to be deflected dependent on a pressure in the first cavity. The device further includes a first membrane metallization layer applied to the first polymer membrane above the first cavity. The first membrane metallization layer is configured to be deflected together with the first polymer membrane dependent on the pressure in the first cavity. The device further includes a second polymer substrate, arranged over the first polymer membrane, a second cavity, arranged over the first cavity, and a second polymer membrane, stretched over the second cavity. The device further includes a second membrane metallization layer applied to the second polymer membrane within the second cavity and includes a third polymer substrate arranged over the second polymer membrane.
Public/Granted literature
- US20140290373A1 POLYMER LAYER SYSTEM PRESSURE SENSOR DEVICE, AND POLYMER LAYER SYSTEM PRESSURE SENSOR METHOD Public/Granted day:2014-10-02
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