Invention Grant
- Patent Title: Heat actuated and projected lithography systems and methods
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Application No.: US14439252Application Date: 2013-10-15
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Publication No.: US09766551B2Publication Date: 2017-09-19
- Inventor: Chad A. Mirkin , Xing Liao , Keith A. Brown , Guoliang Liu , Abrin L. Schmucker , Shu He , Wooyoung Shim , Daniel J. Eichelsdoerfer , Boris Rasin
- Applicant: NORTHWESTERN UNIVERSITY
- Applicant Address: US IL Evanston
- Assignee: NORTHWESTERN UNIVERSITY
- Current Assignee: NORTHWESTERN UNIVERSITY
- Current Assignee Address: US IL Evanston
- Agency: Marshall, Gerstein & Burun LLP
- International Application: PCT/US2013/064959 WO 20131015
- International Announcement: WO2014/070444 WO 20140508
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/54 ; G03F7/20 ; G03F7/00 ; B05D1/26 ; B05D3/06 ; G02B13/14 ; B82Y40/00

Abstract:
In accordance with an embodiment of the disclosure, a method of patterning can include dividing an image into a set of frame sections; determining a tip pattern for a respective portion of an image to be patterned by each tip of the tip array in each frame section of the set of frame sections; disposing the tip array in a patterning position in a first location of the substrate corresponding to a location of the substrate in which the first frame section in the set of frame sections is to be patterned; projecting a first pattern of radiation onto the tip array to selectively irradiate one or more tips of the tip array and pattern the substrate, wherein the first pattern of radiation corresponds to a tip pattern for the first frame section; disposing the tip array in a patterning position in a second location of the substrate corresponding to a location of the substrate in which the second frame section in the set of frame sections is to be patterned; projecting a second pattern of radiation onto the tip array to selectively irradiate tips of the tip array and pattern the substrate, wherein the second pattern of radiation corresponds to a tip pattern for the second frame section; and repeating the disposing and projecting for each frame section in the set of frame sections to pattern the image.
Public/Granted literature
- US20150286148A1 Heat Actuated and Projected Lithography Systems and Methods Public/Granted day:2015-10-08
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