Invention Grant
- Patent Title: Fluid mechanism, support member constituting fluid mechanism and fluid control system
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Application No.: US14925830Application Date: 2015-10-28
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Publication No.: US09766634B2Publication Date: 2017-09-19
- Inventor: Tadahiro Yasuda
- Applicant: HORIBA STEC, Co., Ltd.
- Applicant Address: JP Kyoto-shi, Kyoto
- Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto-shi, Kyoto
- Agency: Alleman Hall Creasman & Tuttle LLP
- Priority: JP2011-221065 20111005; JP2011-222058 20111006
- Main IPC: G05F5/00
- IPC: G05F5/00 ; F16K27/00 ; G05D7/06 ; G01F5/00

Abstract:
This invention provides a fluid mechanism that can arrange a plurality of fluid device units and external fluid devices mounted as a set on the fluid device units effectively and compactly. Each of the fluid device units is arranged with respective side surfaces in a longitudinal direction of the fluid device unit tightly attached, and the external fluid devices are arranged side-by-side external to and outside of the fluid device unit in the width direction. Furthermore, as for an introducing path and a discharging path that connect the external fluid devices and the fluid device unit, the introducing path, which is short, is connected to the discharging path, which is long.
Public/Granted literature
- US20160048136A1 FLUID MECHANISM, SUPPORT MEMBER CONSTITUTING FLUID MECHANISM AND FLUID CONTROL SYSTEM Public/Granted day:2016-02-18
Information query
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