Invention Grant
- Patent Title: Shower plate sintered integrally with gas release hole member and method for manufacturing the same
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Application No.: US14542793Application Date: 2014-11-17
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Publication No.: US09767994B2Publication Date: 2017-09-19
- Inventor: Masahiro Okesaku , Tadahiro Ohmi , Tetsuya Goto , Takaaki Matsuoka , Toshihisa Nozawa , Atsutoshi Inokuchi , Kiyotaka Ishibashi
- Applicant: TOKYO ELECTRON LIMITED , NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Applicant Address: JP Tokyo JP Sendai-Shi
- Assignee: TOKYO ELECTRON LIMITED,NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Current Assignee: TOKYO ELECTRON LIMITED,NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Current Assignee Address: JP Tokyo JP Sendai-Shi
- Agency: Cantor Colburn LLP
- Priority: JP2006-287934 20061023
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/455
Abstract:
A shower plate is disposed in a processing chamber in a plasma processing apparatus, and plasma excitation gas is released into the processing chamber so as to generate plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 μm to 70 μm, and/or a porous gas-communicating body having pores having a maximum diameter of not more than 75 μm communicating in the gas-communicating direction are sintered and bonded integrally with the inside of each of a plurality of vertical holes which act as release paths for the plasma excitation gas.
Public/Granted literature
- US20150069674A1 SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-03-12
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