Invention Grant
- Patent Title: Substrate processing method and substrate processing apparatus
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Application No.: US14716966Application Date: 2015-05-20
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Publication No.: US09768042B2Publication Date: 2017-09-19
- Inventor: Asuka Wakita , Ayumi Higuchi
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2014-105471 20140521
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/306 ; H01L21/67 ; H01L21/687

Abstract:
A substrate processing method is implemented in a substrate processing apparatus including a substrate holding and rotating unit having a spin base rotatable about a predetermined vertical axis, and a processing cup surrounding the substrate holding and rotating unit and arranged to receive processing liquid splattering from the substrate rotated by the substrate holding and rotating unit, the substrate processing method including a substrate rotating step of rotating the spin base to rotate the substrate about the vertical axis at a predetermined liquid processing speed and, in parallel with the substrate rotating step, a processing liquid supplying step of supplying processing liquid onto the lower surface of the substrate at a predetermined first flow rate and supplying processing liquid onto the upper surface of the substrate at a second flow rate that is higher than the first flow rate.
Public/Granted literature
- US20150340251A1 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS Public/Granted day:2015-11-26
Information query
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