Invention Grant
- Patent Title: Electron radiation monitoring electrode system to prevent gold spitting and resist cross-linking during evaporation
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Application No.: US14700361Application Date: 2015-04-30
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Publication No.: US09768081B2Publication Date: 2017-09-19
- Inventor: Kezia Cheng
- Applicant: SKYWORKS SOLUTIONS, INC.
- Applicant Address: US MA Woburn
- Assignee: SKYWORKS SOLUTIONS, INC.
- Current Assignee: SKYWORKS SOLUTIONS, INC.
- Current Assignee Address: US MA Woburn
- Agency: Lando & Anastasi, LLP
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01J37/304 ; H01J37/305 ; G01N27/00 ; H01L21/02 ; C23C14/30 ; C23C14/54

Abstract:
An electrode system configured to be positioned within a vacuum chamber of an electron-beam metal evaporation and deposition apparatus including a metal slug from which metal is evaporated during operation of the electron-beam metal evaporation and deposition apparatus. The electrode system includes a substantially ring-shaped electrode formed of a conductive material and a plurality of insulating standoffs configured to support the substantially ring-shaped electrode in the vacuum chamber in a position substantially surrounding the metal slug.
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Information query
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