Invention Grant
- Patent Title: TFT backplate structure comprising transistors having gate isolation layers of different thicknesses and manufacture method thereof
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Application No.: US14426155Application Date: 2014-09-19
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Publication No.: US09768202B2Publication Date: 2017-09-19
- Inventor: Xiaowen Lv , Chihyuan Tseng , Chihyu Su , Hejing Zhang
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- Priority: CN201410445155 20140902
- International Application: PCT/CN2014/086881 WO 20140919
- International Announcement: WO2016/033837 WO 20160310
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/78 ; H01L21/16 ; H01L21/00 ; H01L29/24 ; H01L21/47 ; H01L29/786 ; H01L21/77

Abstract:
The present invention provides a TFT backplate structure and a manufacture method thereof. The TFT backplate structure comprises a switch TFT (T1) and a drive TFT (T2). The switch TFT (T1) is constructed by a first source/a first drain (61), a first gate (21), and a first etching stopper layer (51), a first oxide semiconductor layer (41), a first gate isolation layer (31) sandwiched in between. The drive TFT (T2) is constructed by a second source/a second drain (62), a second gate (22), and a second oxide semiconductor layer (42), a first etching stopper layer (51), a second gate isolation layer (32) sandwiched in between. The electrical properties of the switch TFT (T1) and the drive TFT (T2) are different. The switch TFT has smaller subthreshold swing to achieve fast charge and discharge, and the drive TFT has relatively larger subthreshold swing for controlling the current and the grey scale more precisely.
Public/Granted literature
- US20160247836A1 TFT BACKPLATE STRUCTURE AND MANUFACTURE METHOD THEREOF Public/Granted day:2016-08-25
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