Invention Grant
- Patent Title: Image sensor including multiple lenses and method of manufacture thereof
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Application No.: US14638861Application Date: 2015-03-04
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Publication No.: US09768224B2Publication Date: 2017-09-19
- Inventor: Tzu-Hsuan Hsu , Dun-Nian Yaung , Yean-Kuen Fang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes & Boone, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A method includes fabricating an image sensing element in a substrate. A plurality of inter-metal dielectric (IMD) layers are formed over the substrate. Each IMD layer includes a metal layer and a dielectric layer. A planar top surface of a top IMD layer of the plurality of IMD layers is planarized. A portion of the top IMD layer is then removed to transform a region of the planar top surface to a curved recess. A lens is formed on the top IMD layer and in the curved recess. A color filter layer is disposed over the lens and the image sensing element.
Public/Granted literature
- US20150187833A1 IMAGE SENSOR INCLUDING MULTIPLE LENSES AND METHOD OF MANUFACTURE THEREOF Public/Granted day:2015-07-02
Information query
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