Invention Grant
- Patent Title: Lithium sputter targets
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Application No.: US14112909Application Date: 2012-04-20
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Publication No.: US09771646B2Publication Date: 2017-09-26
- Inventor: Martin John Neumann , Que Anh Song Nguyen , Disha Mehtani , Anshu A. Pradhan , Robert T. Rozbicki , Dhairya Shrivastava , Trevor Frank , Todd Martin
- Applicant: Martin John Neumann , Que Anh Song Nguyen , Disha Mehtani , Anshu A. Pradhan , Robert T. Rozbicki , Dhairya Shrivastava , Trevor Frank , Todd Martin
- Applicant Address: US CA Milpitas
- Assignee: View, Inc.
- Current Assignee: View, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Agent Brian D. Griedel
- International Application: PCT/US2012/034556 WO 20120420
- International Announcement: WO2012/145702 WO 20121026
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34
Abstract:
Described are methods of fabricating lithium sputter targets, lithium sputter targets, associated handling apparatus, and sputter methods including lithium targets. Various embodiments address adhesion of the lithium metal target to a support structure, avoiding and/or removing passivating coatings formed on the lithium target, uniformity of the lithium target as well as efficient cooling of lithium during sputtering. Target configurations used to compensate for non-uniformities in sputter plasma are described. Modular format lithium tiles and methods of fabrication are described. Rotary lithium sputter targets are also described.
Public/Granted literature
- US20140138242A1 LITHIUM SPUTTER TARGETS Public/Granted day:2014-05-22
Information query
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