Invention Grant
- Patent Title: Multilayer structure offering improved impermeability to gases
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Application No.: US14346890Application Date: 2012-09-24
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Publication No.: US09771654B2Publication Date: 2017-09-26
- Inventor: Stephane Cros , Nicole Alberola , Jean-Paul Garandet , Arnaud Morlier
- Applicant: Commissariat a l'energie atomique et aux ene alt
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1158570 20110926
- International Application: PCT/EP2012/068766 WO 20120924
- International Announcement: WO2013/045393 WO 20130404
- Main IPC: C23C18/14
- IPC: C23C18/14 ; C23C18/12 ; H01L21/02 ; H01L51/52 ; H01L31/048 ; H01L31/0392 ; H01L51/10

Abstract:
A multilayer structure including a substrate and a first stack of a layer of SiO2 and a layer of material of the SiOxNyHz type positioned between the substrate and the layer of SiO2, in which the layer of SiO2 and the layer of material of the SiOxNyHz type have thicknesses (eB, eA) such that the thickness of the layer of SiO2 is less than or equal to 60 nm, the thickness of the layer of material of the SiOxNyHz type (eB) is more than twice the thickness (eA) of the layer of SiO2, and the sum of the thicknesses of the layer of SiO2 and of the layer of material of the SiOxNyHz type is between 100 nm and 500 nm, and in which z is strictly less than the ratio (x+y)/5, and advantageously z is strictly less than the ratio (x+y)/10.
Public/Granted literature
- US20140234602A1 MULTILAYER STRUCTURE OFFERING IMPROVED IMPERMEABILITY TO GASES Public/Granted day:2014-08-21
Information query
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