Invention Grant
- Patent Title: Catadioptric projection objective with parallel, offset optical axes
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Application No.: US14677089Application Date: 2015-04-02
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Publication No.: US09772478B2Publication Date: 2017-09-26
- Inventor: David Shafer , Wilhelm Ulrich , Aurelian Dodoc , Rudolf Murai von Buenau , Hans-Juergen Mann , Alexander Epple
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G02B17/00
- IPC: G02B17/00 ; G02B21/00 ; G02B17/08 ; G03F7/20

Abstract:
A projection objective configured to image an object field in an object plane into an image field in an image field plane includes a reflective unit, a first refractive unit, and a second refractive unit. An optical axis of the first refractive unit is parallel to but displaced from an optical axis of the second refractive unit. The reflective unit includes a first curved mirror and a second curved mirror. The second curved mirror is immediately downstream from the first curved mirror in a path of light from the object plane to the image plane. The projection objective is a microlithography projection objective.
Public/Granted literature
- US20150226948A1 CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES Public/Granted day:2015-08-13
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |