Invention Grant
- Patent Title: Display device having MEMS transmissive light valve and method for forming the same
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Application No.: US14215076Application Date: 2014-03-17
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Publication No.: US09772489B2Publication Date: 2017-09-26
- Inventor: Jianhong Mao , Deming Tang
- Applicant: LEXVU OPTO MICROELECTRONICS TECHNOLOGY (SHANGHAI) LTD
- Applicant Address: CN Shangai
- Assignee: SHANGHAI JADIC OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: SHANGHAI JADIC OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Shangai
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN201310095739 20130322
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81C1/00 ; H01L33/10

Abstract:
A display device having a MEMS transmissive light valve and a method for forming the same are provided. The method includes: providing a multilayer semiconductor substrate comprising a bottom semiconductor layer, a middle buried layer and a top semiconductor layer; forming a light guide opening in the top semiconductor layer; forming at least one MOS device in a remaining part of the top semiconductor layer; forming an interconnection layer and an interlayer dielectric layer on the at least one MOS; forming a MEMS transmissive light valve, which is electrically connected to the interconnection layer, on the light guide opening, where the MEMS transmissive light valve is surrounded by the interlayer dielectric layer; forming a transparent backplane on a top surface of the interlayer dielectric layer; and removing the bottom semiconductor layer.
Public/Granted literature
- US20140284632A1 DISPLAY DEVICE HAVING MEMS TRANSMISSIVE LIGHT VALVE AND METHOD FOR FORMING THE SAME Public/Granted day:2014-09-25
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