Invention Grant
- Patent Title: Copolymer formulation for directed self-assembly, methods of manufacture thereof and articles comprising the same
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Application No.: US15052922Application Date: 2016-02-25
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Publication No.: US09772554B2Publication Date: 2017-09-26
- Inventor: Phillip D. Hustad , Peter Trefonas, III , Valeriy V. Ginzburg , Bongkeun Kim , Glenn H. Fredrickson
- Applicant: Dow Global Technologies LLC , Rohm and Haas Electronic Materials LLC , THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Applicant Address: US MI Midland US MA Marlborough US CA Oakland
- Assignee: DOW GLOBAL TECHNOLOGIES LLC,ROHM AND HAAS ELECTRONIC MATERIALS LLC,THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee: DOW GLOBAL TECHNOLOGIES LLC,ROHM AND HAAS ELECTRONIC MATERIALS LLC,THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee Address: US MI Midland US MA Marlborough US CA Oakland
- Agency: Cantor Colburn LLP
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/40 ; G03F7/16 ; H01L21/027 ; C09D153/00 ; C09D5/00 ; C09D7/12 ; G03F7/20 ; G03F7/00 ; H01L21/3065 ; H01L21/02 ; B82Y40/00 ; B82Y10/00 ; C08F293/00 ; C08F299/00 ; C08L53/00
Abstract:
Disclosed herein is a pattern forming method comprising providing a substrate devoid of a layer of a brush polymer; disposing upon the substrate a composition comprising a block copolymer comprising a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other; and an additive polymer where the additive polymer comprises a bottlebrush polymer; where the bottlebrush polymer comprises a polymeric chain backbone and a grafted polymer that are bonded to each other; and where the bottlebrush polymer comprises a polymer that is chemically and structurally the same as one of the polymers in the block copolymer or where the bottlebrush polymer comprises a polymer that has a preferential interaction with one of the blocks of the block copolymers; and a solvent; and annealing the composition to facilitate domain separation between the first polymer and the second polymer.
Public/Granted literature
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