- Patent Title: Integrated magnetic devices with multi-axial magnetic anisotropy
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Application No.: US14675657Application Date: 2015-03-31
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Publication No.: US09773612B2Publication Date: 2017-09-26
- Inventor: Amal El-Ghazaly , Shan X. Wang
- Applicant: The Board of Trustees of the Leland Stanford Junior University
- Applicant Address: US CA Palo Alto
- Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee Address: US CA Palo Alto
- Agency: Lumen Patent Firm
- Main IPC: H01F41/14
- IPC: H01F41/14 ; H01F41/02 ; H01L41/09 ; H01L41/12

Abstract:
A method of fabricating in-plane or out-of-plane thin-film multi-axial magnetic anisotropy devices is provided that includes either depositing a magnetic material with perpendicular or partially perpendicular anisotropy patterned into a multi-directional, curved, or closed path or depositing a thin-film of magnetic material on a piezoelectric material, where the magnetic material is arranged in a pattern, depositing excitation electrodes on the piezoelectric material, where the excitation electrodes are arranged in a pattern, biasing the piezoelectric material, by applying a voltage across the excitation electrodes, where an electric field through the piezoelectric material is generated by the applied voltage across the excitation electrodes, where the piezoelectric material is biased by the electric field to provide stress to the magnetic material, where the stress rotates a magnetization of the magnetic material, and patterning the magnetic material into a multi-directional, curved, or closed path.
Public/Granted literature
- US20150206657A1 Integrated Magnetic Devices with Multi-Axial Magnetic Anisotropy Public/Granted day:2015-07-23
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