Invention Grant
- Patent Title: Apparatus for forming a transition metal chalcogenide thin-film
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Application No.: US15205983Application Date: 2016-07-08
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Publication No.: US09773668B2Publication Date: 2017-09-26
- Inventor: Gwan Hyoung Lee , So Jung Kang , Seung Min Lee , Yong Soo Cho
- Applicant: UNIVERSITY-INDUSTRY FOUNDATION (UIF), YONSEI UNIVERSITY
- Applicant Address: KR Seoul
- Assignee: UNIVERSITY-INDUSTRY FOUNDATION (UIF), YONSEI UNIVERSITY
- Current Assignee: UNIVERSITY-INDUSTRY FOUNDATION (UIF), YONSEI UNIVERSITY
- Current Assignee Address: KR Seoul
- Priority: KR10-2015-0097543 20150709
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C23C14/22 ; C23C14/04 ; C23C14/58

Abstract:
Provided is a method of forming a transition metal chalcogenide thin-film and the method includes preparing a first substrate having formed thereon a transition metal-containing precursor thin-film; displacing a second substrate separately with a constant distance from the first substrate by using a bridge unit while the second substrate is facing the first substrate, thereby securing a gas flowing path between the first substrate and the second substrate; heating the first and second substrates to a reaction temperature; and introducing a chalcogen-containing gas from an end of a reactor, such that the chalcogen-containing gas flows via the path.
Public/Granted literature
- US20170011916A1 METHOD OF FABRICATING TRANSITION METAL CHALCOGENIDE IN LARGE SCALE AND APPARATUS FOR THE METHOD Public/Granted day:2017-01-12
Information query
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