Invention Grant
- Patent Title: Piezoelectric film, ferroelectric ceramics and inspection method of piezoelectric film
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Application No.: US14575109Application Date: 2014-12-18
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Publication No.: US09773968B2Publication Date: 2017-09-26
- Inventor: Takeshi Kijima , Yuuji Honda , Yukinori Tani
- Applicant: YOUTEC CO., LTD.
- Applicant Address: JP Chiba
- Assignee: YOUTEC CO., LTD.
- Current Assignee: YOUTEC CO., LTD.
- Current Assignee Address: JP Chiba
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2013-272681 20131227
- Main IPC: G01N23/207
- IPC: G01N23/207 ; H01L41/187 ; H01L41/08 ; H01L41/319 ; C04B35/491

Abstract:
To obtain a piezoelectric film having excellent piezoelectric properties. An aspect of the present invention is a piezoelectric film having a crystal oriented in the c-axis direction and a crystal oriented in the a-axis direction, in which, when denoting the amount of a (004) component of the crystal oriented in the c-axis direction by C and denoting the amount of a (400) component of the crystal oriented in the a-axis direction by A, the piezoelectric film satisfies a formula 1 below. C/(A+C)≧0.1 formula 1
Public/Granted literature
- US20150183190A1 PIEZOELECTRIC FILM, FERROELECTRIC CERAMICS AND INSPECTION METHOD OF PIEZOELECTRIC FILM Public/Granted day:2015-07-02
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