Invention Grant
- Patent Title: Femtosecond laser processing system with process parameters controls and feedback
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Application No.: US14837619Application Date: 2015-08-27
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Publication No.: US09774160B2Publication Date: 2017-09-26
- Inventor: Donald J. Harter
- Applicant: IMRA AMERICA, INC.
- Applicant Address: US MI Ann Arbor
- Assignee: IMRA AMERICA, INC.
- Current Assignee: IMRA AMERICA, INC.
- Current Assignee Address: US MI Ann Arbor
- Agency: Sughrue Mion, PLLC
- Agent Richard C. Turner
- Main IPC: H01S3/10
- IPC: H01S3/10 ; G01J11/00 ; H01S3/00 ; H01S3/102 ; H01S3/108 ; H01S3/067 ; H01S3/109 ; H01S3/13 ; H01S3/16
Abstract:
A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.
Public/Granted literature
- US20150372445A1 FEMTOSECOND LASER PROCESSING SYSTEM WITH PROCESS PARAMETERS CONTROLS AND FEEDBACK Public/Granted day:2015-12-24
Information query
