Invention Grant
- Patent Title: Method for slicing ingot and wire saw
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Application No.: US14911075Application Date: 2014-07-24
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Publication No.: US09776340B2Publication Date: 2017-10-03
- Inventor: Keiichi Kanbayashi
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2013-177039 20130828
- International Application: PCT/JP2014/003889 WO 20140724
- International Announcement: WO2015/029323 WO 20150305
- Main IPC: B28D5/00
- IPC: B28D5/00 ; B28D5/04 ; B24B27/06

Abstract:
A method is disclosed for slicing an ingot by which wire rows are formed by using a wire that is spirally wound between a plurality of wire guides and travels in an axial direction. An ingot is pressed against the wire rows while supplying a working fluid to a contact portion of the ingot and the wire, thereby slicing the ingot into wafers, and a ratio of a wire new line feed amount per unit time in slicing of a slicing start portion of a first ingot to that in slicing of a centration portion of the same at the time of slicing the ingot after replacement of the wire is controlled to be ½ or less of the ratio at the time of slicing second and subsequent ingots after the replacement of the wire.
Public/Granted literature
- US20160176069A1 METHOD FOR SLICING INGOT AND WIRE SAW Public/Granted day:2016-06-23
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