Invention Grant
- Patent Title: Mullite sintered body, method for producing the same, and composite substrate
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Application No.: US15064968Application Date: 2016-03-09
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Publication No.: US09776924B2Publication Date: 2017-10-03
- Inventor: Yoshinori Isoda , Yosuke Sato , Yuji Katsuda
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown, PLLC
- Priority: JP2014-117926 20140606; JP2015-053190 20150317
- Main IPC: C04B35/185
- IPC: C04B35/185 ; C04B35/645 ; C04B37/00 ; C04B37/02

Abstract:
A mullite sintered body according to the present invention has an impurity element content of 1% by mass or less and contains sintered mullite grains having an average grain size of 8 μm or less. When a surface of the mullite sintered body is finished by polishing, pores in the surface have an average largest pore length of 0.4 μm or less. The surface preferably has a center line average surface roughness (Ra) of 3 nm or less. The surface preferably has a maximum peak height (Rp) of 30 nm or less. The number of pores in the surface is preferably 10 or less per unit area of 4 μm×4 μm.
Public/Granted literature
- US20160185668A1 MULLITE SINTERED BODY, METHOD FOR PRODUCING THE SAME, AND COMPOSITE SUBSTRATE Public/Granted day:2016-06-30
Information query
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