Invention Grant
- Patent Title: Silicon single crystal growing device and method of growing the same
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Application No.: US14418820Application Date: 2014-06-05
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Publication No.: US09777395B2Publication Date: 2017-10-03
- Inventor: Su-In Jeon
- Applicant: LG Siltron Inc.
- Applicant Address: KR Gyeongsangbuk-Do
- Assignee: LG Siltron, Inc.
- Current Assignee: LG Siltron, Inc.
- Current Assignee Address: KR Gyeongsangbuk-Do
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2013-0071494 20130621
- International Application: PCT/KR2014/005003 WO 20140605
- International Announcement: WO2014/204119 WO 20141224
- Main IPC: C30B15/20
- IPC: C30B15/20 ; C30B29/06 ; C30B15/14 ; C30B15/26

Abstract:
An apparatus for growing a silicon single crystal according to embodiments includes a chamber including a crucible accommodating silicon melt; a support shaft rotating and lifting the crucible while supporting the crucible; a main heater part for applying heat to the crucible side, the heater disposed beside the crucible; an upper heat insulation member located over the crucible; and upper heater parts located at a lower end portion of the upper heat insulation member, wherein the upper heater parts have diameters different from each other with respect to a center of the crucible, and include a plurality of ring-shaped heaters which are spaced apart from each other. Due to the individually controllable upper heater parts, a uniform thermal environment can be provided for silicon melt accommodated in a crucible, and localized solidification of the silicon melt can be prevented so that the quality of a silicon single crystal and the ingot pulling speed can be readily controlled.
Public/Granted literature
- US20160102419A1 SILICON SINGLE CRYSTAL GROWING DEVICE AND METHOD OF GROWING THE SAME Public/Granted day:2016-04-14
Information query
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