Invention Grant
- Patent Title: Method for producing SiC single crystal
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Application No.: US14920397Application Date: 2015-10-22
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Publication No.: US09777399B2Publication Date: 2017-10-03
- Inventor: Katsunori Danno
- Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Toyota
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Toyota
- Agency: Oliff PLC
- Priority: JP2014-223796 20141031
- Main IPC: C30B19/04
- IPC: C30B19/04 ; C30B29/36 ; C30B19/10

Abstract:
A method for producing a SiC single crystal, comprising using a Si—C solution having a temperature gradient in which the temperature decreases from the interior toward the surface to grow a SiC single crystal from a seed crystal substrate, wherein the Si—C solution includes Si and Cr, the boron density difference Bs−Bg between the boron density Bs in the seed crystal substrate and the boron density Bg in the growing single crystal is 1×1017/cm3 or greater, the chromium density difference Crg−Crs between the chromium density Crs in the seed crystal substrate and the chromium density Crg in the growing single crystal is 1×1016/cm3 or greater, and the nitrogen density difference Ng−Ns between the nitrogen density Ns in the seed crystal substrate and the nitrogen density Ng in the growing single crystal is 3.5×1018/cm3 to 5.8×1018/cm3.
Public/Granted literature
- US20160122901A1 METHOD FOR PRODUCING SIC SINGLE CRYSTAL Public/Granted day:2016-05-05
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