Invention Grant
- Patent Title: Single-crystal silicon carbide and single-crystal silicon carbide wafer
-
Application No.: US12998357Application Date: 2009-10-14
-
Publication No.: US09777403B2Publication Date: 2017-10-03
- Inventor: Masashi Nakabayashi , Tatsuo Fujimoto , Masakazu Katsuno , Hiroshi Tsuge
- Applicant: Masashi Nakabayashi , Tatsuo Fujimoto , Masakazu Katsuno , Hiroshi Tsuge
- Applicant Address: JP Chiyoda-Ku, Tokyo
- Assignee: NIPPON STEEL & SUMITOMO METAL CORPORATION
- Current Assignee: NIPPON STEEL & SUMITOMO METAL CORPORATION
- Current Assignee Address: JP Chiyoda-Ku, Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2008-265926 20081015
- International Application: PCT/JP2009/068084 WO 20091014
- International Announcement: WO2010/044484 WO 20100422
- Main IPC: C30B29/36
- IPC: C30B29/36 ; C30B23/00 ; C30B25/00 ; C30B23/02

Abstract:
A single-crystal silicon carbide and a single-crystal silicon carbide wafer of good-quality are disclosed that are low in dislocations, micropipes and other crystal defects and enable high yield and high performance when applied to a device, wherein the ratio of doping element concentrations on opposite sides in the direction of crystal growth of the interface between the seed crystal and the grown crystal is 5 or less and the doping element concentration of the grown crystal in the vicinity of the seed crystal is 2×1019 cm−3 to 6×1020 cm−3.
Public/Granted literature
- US20110206929A1 SINGLE-CRYSTAL SILICON CARBIDE AND SINGLE-CRYSTAL SILICON CARBIDE WAFER Public/Granted day:2011-08-25
Information query
IPC分类: