Invention Grant
- Patent Title: Resonant CO2 sensing with mitigation of cross-sensitivities
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Application No.: US14480986Application Date: 2014-09-09
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Publication No.: US09778238B2Publication Date: 2017-10-03
- Inventor: Casper van der Avoort , Willem Besling
- Applicant: ams International AG
- Applicant Address: CH Rapperswil-Jona
- Assignee: ams International AG
- Current Assignee: ams International AG
- Current Assignee Address: CH Rapperswil-Jona
- Agency: McDermott Will & Emery LLP
- Main IPC: G01N33/00
- IPC: G01N33/00 ; G01N29/22 ; G01N29/32 ; G01N29/44 ; G01L9/00 ; G01N29/02 ; G01N29/036 ; G01N29/24

Abstract:
Various exemplary embodiments relate to a device to measure carbon dioxide (CO2) levels, including a first oscillator group comprising a first sensor to measure air pressure, where the first sensor comprises a first sealed membrane, and where the first sealed membrane overlays a sealed first cavity; a second oscillator group including a second sensor to measure the resonance frequency of a second unsealed oscillating membrane, and where the second unsealed membrane overlays a second cavity in contact with the air outside of the second sensor; and a mixer accepting as input a first frequency measurement output from the first oscillator group and a second frequency measurement output from the second oscillator group, outputting the difference of the first frequency measurement and the second frequency measurement, and computing a carbon dioxide measurement based on the difference.
Public/Granted literature
- US20160069850A1 RESONANT CO2 SENSING WITH MITIGATION OF CROSS-SENSITIVITIES Public/Granted day:2016-03-10
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