Invention Grant
- Patent Title: Resist composition, method of forming resist pattern, polymeric compound, compound
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Application No.: US14540239Application Date: 2014-11-13
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Publication No.: US09778567B2Publication Date: 2017-10-03
- Inventor: Masatoshi Arai , Yoshiyuki Utsumi
- Applicant: Tokyo Ohka Kogyo Co., Ltd.
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2013-236868 20131115
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C08F220/36 ; C08F220/38 ; G03F7/039 ; C08F220/28

Abstract:
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, and which includes a base component (A) which exhibits changed solubility in a developing solution under action of acid, the base component (A) including a polymeric compound (A1) having a structural unit (a0) represented by general formula (a0-0) shown below (wherein V11 represents an aliphatic cyclic group with or without a substituent; R1 represents a lactam-containing cyclic group or a sultam-containing cyclic group; Y1 represents an oxygen atom (—O—), an ester bond (—C(═O)—O—) or a single bond; and W2 represents a group formed by a polymerization reaction of a polymerizable group-containing group).
Public/Granted literature
- US20150140497A1 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, POLYMERIC COMPOUND, COMPOUND Public/Granted day:2015-05-21
Information query
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