Invention Grant
- Patent Title: Positive photosensitive resin composition, method for producing film using same, and electronic component
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Application No.: US15033318Application Date: 2014-10-24
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Publication No.: US09778569B2Publication Date: 2017-10-03
- Inventor: Makoto Seino , Kazuhiro Yamanaka , Masafumi Oda , Junya Nakatsuji
- Applicant: Central Glass Company, Limited
- Applicant Address: JP Ube-shi
- Assignee: Central Glass Company, Limited
- Current Assignee: Central Glass Company, Limited
- Current Assignee Address: JP Ube-shi
- Agency: Crowell & Moring LLP
- Priority: JP2013-228477 20131101; JP2013-253529 20131206; JP2014-145650 20140716
- International Application: PCT/JP2014/078394 WO 20141024
- International Announcement: WO2015/064509 WO 20150507
- Main IPC: G03F7/075
- IPC: G03F7/075 ; C08L83/06 ; C08G77/18 ; C08G77/16 ; H01L21/027 ; C08L83/04 ; C09D183/04 ; G03F7/004 ; G03F7/023 ; G03F7/16 ; G03F7/20 ; G03F7/32 ; G03F7/40

Abstract:
A positive photosensitive resin composition according to the present invention contains at least (A) a polysiloxane compound having at least a structural unit of the general formula (1), (B) a photoacid generator or quinone diazide compound and (C) a solvent [(RX)bR1mSiOn/2] (1) where RX represents the following group; R1 each represents a hydrogen atom, C1-C3 alkyl group, phenyl group, hydroxy group, C1-C3 alkoxy group or C1-C3 fluoroalkyl group; b represents an integer of 1 to 3; m represents an integer of 0 to 2; n represents an integer of 1 to 3; and b, m and n satisfy b+m+n=4, where X each represents a hydrogen atom or acid labile group; and a represents an integer of 1 to 5. It is possible by the use of this positive photosensitive resin composition to provide a film with high resistance and heat-resistant transparency and provide an electronic component with such a film.
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