Invention Grant
- Patent Title: Apparatus and method for fine-tuning magnet arrays with localized energy delivery
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Application No.: US14565166Application Date: 2014-12-09
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Publication No.: US09779872B2Publication Date: 2017-10-03
- Inventor: John Gerling
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Okamoto & Benedicto LLP
- Main IPC: H01F13/00
- IPC: H01F13/00 ; H01F41/02

Abstract:
One embodiment relates to an apparatus for adjustment of local magnetic strength in a magnetic device. A stage holds the magnetic device, and a sensor measures a magnetic field at locations above the magnetic device so as to generate magnetic field data. A computer system detects a non-uniformity in the magnetic field from the magnetic field data and determines a location and a duration for application of a pulsed laser beam to correct the non-uniformity. A laser device applies the pulsed laser beam at said location for said duration. Another embodiment relates to a method of adjusting local magnetic strength in a magnetic device. Another embodiment relates to a system for fine-tuning a magnet array with localized energy delivery. Other embodiments, aspects and features are also disclosed.
Public/Granted literature
- US20150179327A1 APPARATUS AND METHOD FOR FINE-TUNING MAGNET ARRAYS WITH LOCALIZED ENERGY DELIVERY Public/Granted day:2015-06-25
Information query
IPC分类:
H | 电学 |
H01 | 基本电气元件 |
H01F | 磁体;电感;变压器;磁性材料的选择 |
H01F13/00 | 磁化或去磁的设备或方法 |