Invention Grant
- Patent Title: Method for manufacturing semiconductor device
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Application No.: US15132283Application Date: 2016-04-19
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Publication No.: US09779951B2Publication Date: 2017-10-03
- Inventor: Kazunari Nakata , Yoshiaki Terasaki , Masatoshi Sunamoto
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2015-182083 20150915
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L21/288 ; H01L21/3213 ; H01L21/768 ; H01L29/66

Abstract:
A method for manufacturing a semiconductor device includes: forming a first major electrode on a first major surface of a semiconductor substrate; forming a second major electrode on a second major surface of the semiconductor substrate opposite to the first major surface; carrying out a surface activating treatment to activate surfaces of the first and second major electrodes; carrying out a surface cleaning treatment to clean up the surfaces of the first and second major electrodes; and after the surface activating treatment and the surface cleaning treatment, simultaneously forming first and second Ni films on the first and second major electrodes respectively by a wet film forming method, wherein a ratio of crystalline Ni contained in the first and second Ni films is 2% or more.
Public/Granted literature
- US20170076948A1 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2017-03-16
Information query
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