Invention Grant
- Patent Title: Vertical memory devices and methods of manufacturing the same
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Application No.: US14965532Application Date: 2015-12-10
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Publication No.: US09780096B2Publication Date: 2017-10-03
- Inventor: Sang-yong Park , Kee-jeong Rho , Hyeong Park , Tae-wan Lim
- Applicant: Sang-yong Park , Kee-jeong Rho , Hyeong Park , Tae-wan Lim
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0006980 20150114
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L29/423 ; H01L29/792 ; H01L27/108 ; H01L23/31 ; H01L27/11568 ; H01L27/11573 ; H01L27/11582 ; H01L29/78 ; H01L27/1157 ; H01L27/11575

Abstract:
Vertical memory devices, and methods of manufacturing the same, include providing a substrate including a cell array region and a peripheral circuit region, forming a mold structure in the cell array region, forming an opening for a common source line passing through the mold structure and extending in a first direction perpendicular to a top surface of the substrate, forming a first contact plug having an inner sidewall delimiting a recessed region in the opening for the common source line, and forming a common source bit line contact electrically connected to the inner sidewall of the first contact plug.
Public/Granted literature
- US20160204111A1 VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2016-07-14
Information query
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