Invention Grant
- Patent Title: Semiconductor device with partially unsilicided source/drain
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Application No.: US14958070Application Date: 2015-12-03
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Publication No.: US09780180B2Publication Date: 2017-10-03
- Inventor: Harry-Hak-Lay Chuang , Lee-Wee Teo , Ming Zhu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW
- Agency: Hauptman Ham, LLP
- Main IPC: H01L29/45
- IPC: H01L29/45 ; H01L29/417 ; H01L29/66 ; H01L29/78 ; H01L29/08 ; H01L29/49 ; H01L21/28 ; H01L29/51

Abstract:
A transistor includes a substrate and a gate over the substrate. The transistor further includes a source and a drain over the substrate on opposite sides of the gate. The transistor further includes a channel region beneath the gate separating the source from the drain, the channel region having a channel width with respect to a surface of the substrate greater than a width of the gate with respect to the surface of the substrate. The transistor further includes a silicide over a first portion of the drain, wherein a second portion of the drain, closer to the gate than the first portion, is an unsilicided region.
Public/Granted literature
- US20160087060A1 SEMICONDUCTOR DEVICE WITH PARTIALLY UNSILICIDED SOURCE/DRAIN Public/Granted day:2016-03-24
Information query
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